JPH0644096Y2 - 高周波誘導加熱用サセプタ - Google Patents
高周波誘導加熱用サセプタInfo
- Publication number
- JPH0644096Y2 JPH0644096Y2 JP1988087886U JP8788688U JPH0644096Y2 JP H0644096 Y2 JPH0644096 Y2 JP H0644096Y2 JP 1988087886 U JP1988087886 U JP 1988087886U JP 8788688 U JP8788688 U JP 8788688U JP H0644096 Y2 JPH0644096 Y2 JP H0644096Y2
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- frequency induction
- induction heating
- heating
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988087886U JPH0644096Y2 (ja) | 1988-07-01 | 1988-07-01 | 高周波誘導加熱用サセプタ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988087886U JPH0644096Y2 (ja) | 1988-07-01 | 1988-07-01 | 高周波誘導加熱用サセプタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH029425U JPH029425U (en]) | 1990-01-22 |
JPH0644096Y2 true JPH0644096Y2 (ja) | 1994-11-14 |
Family
ID=31312475
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988087886U Expired - Lifetime JPH0644096Y2 (ja) | 1988-07-01 | 1988-07-01 | 高周波誘導加熱用サセプタ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0644096Y2 (en]) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04129434U (ja) * | 1991-01-25 | 1992-11-26 | ハリソン電機株式会社 | 照光式押釦スイツチ |
US20170051407A1 (en) * | 2015-08-17 | 2017-02-23 | Applied Materials, Inc. | Heating Source For Spatial Atomic Layer Deposition |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62170627U (en]) * | 1986-04-17 | 1987-10-29 |
-
1988
- 1988-07-01 JP JP1988087886U patent/JPH0644096Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH029425U (en]) | 1990-01-22 |
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